Titanium-silicon target material-Tarfilm丨Expert in the Production of High-Quality Target Materials

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Titanium-silicon target material

Hard coatings are evolving towards diversification and nanostructure. Adding doping elements to improve hardness, oxidation temperature, and lubricity while reducing internal stress is a major R&D direction. Adding Si to TiAlN coatings or B to CrAlN coatings refines grains, improves tribological properties, and significantly extends tool life, especially for gear machining.

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Titanium-silicon target material

Our CrAlB and TiAlSi targets feature high density, uniform structure, and stable quality, widely adopted by renowned coating enterprises.

100 µm grain structure

Product Name (at%) Composition	Titanium silicide (TiSi) )
Production process	Powder Metallurgy – HIP/SPS
Target material purity	≥99.8%
Average grain size	≤100μm
Relative density	≥99%
Typical composition	TiSiW75/25, 80/20, and 85/15 can be customized upon request.
Common specifications	D16012, D10516 can be customized upon request.
Common Structures	Single-layer/Double-layer

Efficient, durable, and reliable

Our sputtering targets boast exceptional purity, density, and finer grain sizes—qualities that have earned widespread acclaim in the industry. These superior characteristics enable the formation of stronger, denser, and smoother coatings on substrates, ensuring an efficient, durable, and reliable product experience. How do we achieve this? At the raw-material stage, we source only premium-grade materials and rigorously adhere to strict procurement standards. On the production floor, our team brings decades of expertise, mastering the art of crafting high‑quality sputtering targets. And during quality control, standardized inspection procedures combined with state‑of‑the‑art precision equipment ensure that even the slightest imperfections are identified and addressed, delivering products that are flawless.

We offer customized solutions.

We have a dedicated team of materials scientists and engineers ready to provide you with comprehensive, customized services. From dimensions and shapes to product‑specific performance requirements, we can even co‑develop solutions with you, offering design and development services for target material structures, compositions, and more—truly starting from your needs to deliver products that meet your expectations.

We remain steadfast in our pursuit of exceptional quality.

A high-caliber R&D team is the cornerstone of exceptional quality, and the passion and dedication our employees bring to the target‑material business are paramount. Notably, even entry‑level staff hold shares in the company. At TARFILM Technology, every target material is treated with the utmost care—just as if it were their own child. We welcome you to visit TARFILM Technology and experience our unwavering passion for the target‑material industry.

Efficient, durable, and reliable

We offer customized solutions.

We remain steadfast in our pursuit of exceptional quality.

Building L, Pingqian Industrial Park, No. 46 Chunxing Road, Xiangcheng District, Suzhou City, Jiangsu Province

0512-6580 1669 / 010-6215 2801

sales@tarfilm.com

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