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Chromium-silicon target material

The CrSiN coating formed by CrSi targets via PVD processes significantly enhances various mechanical properties compared to the CrN coating formed by Cr targets. The addition of Si forms nanocrystalline CrN and amorphous SiN. The amorphous SiN prevents the growth of CrN grains, thereby refining the grains and improving mechanical properties such as hardness and film-substrate adhesion.

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Chromium-silicon target material

100 µm grain structure

100 µm grain structure

Product Name (at%)

Composition

Chromium silicide (CrSi)

Production process

Powder Metallurgy – HIP/SPS

Target material purity

99.8%

Average grain size

≤100μm

  Relative density

≥99%

Typical composition

CrSi85/15, 90/10, 95/05—customizable upon request.

Common specifications

D160*12, D105*16—customizable upon request.

Common Structures

Single-layer/Gu-based composite

Efficient, durable, and reliable

Our sputtering targets boast exceptional purity, density, and finer grain sizes—qualities that have earned widespread acclaim in the industry. These superior characteristics enable the formation of stronger, denser, and smoother coatings on substrates, ensuring an efficient, durable, and reliable product experience. How do we achieve this? At the raw-material stage, we source only premium-grade materials and rigorously adhere to strict procurement standards. On the production floor, our team brings decades of expertise, mastering the art of crafting high‑quality sputtering targets. And during quality control, standardized inspection procedures combined with state‑of‑the‑art precision equipment ensure that even the slightest imperfections are identified and addressed, delivering products that are flawless.

We offer customized solutions.

We have a dedicated team of materials scientists and engineers ready to provide you with comprehensive, customized services. From dimensions and shapes to product‑specific performance requirements, we can even co‑develop solutions with you, offering design and development services for target material structures, compositions, and more—truly starting from your needs to deliver products that meet your expectations.

We remain steadfast in our pursuit of exceptional quality.

A high-caliber R&D team is the cornerstone of exceptional quality, and the passion and dedication our employees bring to the target‑material business are paramount. Notably, even entry‑level staff hold shares in the company. At TARFILM Technology, every target material is treated with the utmost care—just as if it were their own child. We welcome you to visit TARFILM Technology and experience our unwavering passion for the target‑material industry.

Efficient, durable, and reliable

Our sputtering targets boast exceptional purity, density, and finer grain sizes—qualities that have earned widespread acclaim in the industry. These superior characteristics enable the formation of stronger, denser, and smoother coatings on substrates, ensuring an efficient, durable, and reliable product experience. How do we achieve this? At the raw-material stage, we source only premium-grade materials and rigorously adhere to strict procurement standards. On the production floor, our team brings decades of expertise, mastering the art of crafting high‑quality sputtering targets. And during quality control, standardized inspection procedures combined with state‑of‑the‑art precision equipment ensure that even the slightest imperfections are identified and addressed, delivering products that are flawless.

We offer customized solutions.

We have a dedicated team of materials scientists and engineers ready to provide you with comprehensive, customized services. From dimensions and shapes to product‑specific performance requirements, we can even co‑develop solutions with you, offering design and development services for target material structures, compositions, and more—truly starting from your needs to deliver products that meet your expectations.

We remain steadfast in our pursuit of exceptional quality.

A high-caliber R&D team is the cornerstone of exceptional quality, and the passion and dedication our employees bring to the target‑material business are paramount. Notably, even entry‑level staff hold shares in the company. At TARFILM Technology, every target material is treated with the utmost care—just as if it were their own child. We welcome you to visit TARFILM Technology and experience our unwavering passion for the target‑material industry.

Building L, Pingqian Industrial Park, No. 46 Chunxing Road, Xiangcheng District, Suzhou City, Jiangsu Province

0512-6580 1669 / 010-6215 2801

sales@tarfilm.com

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