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High-purity chromium target (4N)
As the core material for photomasks, 4N Chromium targets (99.99% purity) play an irreplaceable role in semiconductor and flat panel display manufacturing. Their high purity and fine processing characteristics directly determine the pattern precision and yield of photomasks, making them a key material driving process development. In photomasks, the chromium layer is deposited onto the quartz substrate via magnetron sputtering to form a light-shielding pattern. 4N Cr targets have become the mainstream choice for mid-to-high-end photomasks due to their high etching precision (up to nanoscale), uniform coating ability, and non-toxic stability. Compared to emulsion light-shielding films or iron oxide, chromium films achieve sharper pattern edges and higher durability, suitable for multiple lithography processes in complex integrated circuits.
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High-purity chromium target (4N)
|
Ingredients (at%) Composition |
Purity Purity |
Density Density |
Grain size Grain Size |
Manufacturing process Process |
|---|---|---|---|---|
| Cr | 99.5% | >99.8% | <150 µm | Hot Isostatic Pressing |
| Cr | 99.8% | >99.8% |
<150 µm |
Hot Isostatic Pressing |
| Cr | 99.9% | >99.8% | <150 µm | Hot Isostatic Pressing |
| Cr | 99.95% | >99.8% |
<200um <100um |
Hot Isostatic Pressing |
| Cr | 99.99% | >99.8% | <100um | Hot Isostatic Pressing |
|
Size Size(mm) |
Φ301*12 / Φ160×12 / Φ100×32 / Φ105×16 / Φ63×32 170*75*12 / 656*133*12 / 1701*132*12 Maximum length up to 1800 mm, maximum diameter up to 340 mm. |
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Efficient, durable, and reliable
Our sputtering targets boast exceptional purity, density, and finer grain sizes—qualities that have earned widespread acclaim in the industry. These superior characteristics enable the formation of stronger, denser, and smoother coatings on substrates, ensuring an efficient, durable, and reliable product experience. How do we achieve this? At the raw-material stage, we source only premium-grade materials and rigorously adhere to strict procurement standards. On the production floor, our team brings decades of expertise, mastering the art of crafting high‑quality sputtering targets. And during quality control, standardized inspection procedures combined with state‑of‑the‑art precision equipment ensure that even the slightest imperfections are identified and addressed, delivering products that are flawless.
We offer customized solutions.
We have a dedicated team of materials scientists and engineers ready to provide you with comprehensive, customized services. From dimensions and shapes to product‑specific performance requirements, we can even co‑develop solutions with you, offering design and development services for target material structures, compositions, and more—truly starting from your needs to deliver products that meet your expectations.
We remain steadfast in our pursuit of exceptional quality.
A high-caliber R&D team is the cornerstone of exceptional quality, and the passion and dedication our employees bring to the target‑material business are paramount. Notably, even entry‑level staff hold shares in the company. At TARFILM Technology, every target material is treated with the utmost care—just as if it were their own child. We welcome you to visit TARFILM Technology and experience our unwavering passion for the target‑material industry.
Efficient, durable, and reliable
Our sputtering targets boast exceptional purity, density, and finer grain sizes—qualities that have earned widespread acclaim in the industry. These superior characteristics enable the formation of stronger, denser, and smoother coatings on substrates, ensuring an efficient, durable, and reliable product experience. How do we achieve this? At the raw-material stage, we source only premium-grade materials and rigorously adhere to strict procurement standards. On the production floor, our team brings decades of expertise, mastering the art of crafting high‑quality sputtering targets. And during quality control, standardized inspection procedures combined with state‑of‑the‑art precision equipment ensure that even the slightest imperfections are identified and addressed, delivering products that are flawless.
We offer customized solutions.
We have a dedicated team of materials scientists and engineers ready to provide you with comprehensive, customized services. From dimensions and shapes to product‑specific performance requirements, we can even co‑develop solutions with you, offering design and development services for target material structures, compositions, and more—truly starting from your needs to deliver products that meet your expectations.
We remain steadfast in our pursuit of exceptional quality.
A high-caliber R&D team is the cornerstone of exceptional quality, and the passion and dedication our employees bring to the target‑material business are paramount. Notably, even entry‑level staff hold shares in the company. At TARFILM Technology, every target material is treated with the utmost care—just as if it were their own child. We welcome you to visit TARFILM Technology and experience our unwavering passion for the target‑material industry.
Building L, Pingqian Industrial Park, No. 46 Chunxing Road, Xiangcheng District, Suzhou City, Jiangsu Province
0512-6580 1669 / 010-6215 2801
sales@tarfilm.com
